Device-correlated metrology for overlay measurements

Enhancing metrology sensitivity by weak measurements

Quantummechanics imposes strict limits on the precision attainable for various sets of measurements. Understanding the fundamental principles of these restrictions enables the realization of metrology schemes that can fully exploit available resources, resulting in significant improvement of both classical and quantum measurements. Quantum photonic resources can be employed for novel metrology ...

Haptic Overlay Device for Flat Panel Touch Displays

In an effort to present users with an increasing amount of information, many industries including automotive and aerospace are adopting flat panel touch displays as a user interface. These interfaces are becoming popular due to their reconfigurability so that control and display functions can be embedded in multiple layers or menus. However, one of the disadvantages of this approach is the need...

Highly sensitive frequency metrology for optical anisotropy measurements.

In this paper we present a novel apparatus aimed at measuring very small birefringences and anisotropies and based on frequency metrology and not on polarimetry as usual. In our experiment, a very high finesse resonant cavity is used to convert the phase difference into a resonance frequency difference, which can then be measured with very high accuracy. We describe the setup and present the re...

A new Overlay for Plaquing Animal Viruses

Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts

Metrology applications commonly require non-contact, capacitive sensors for displacement measurements due to their nanometer resolution. In some metrology applications, for example, the measurement of roundness and spindle error motion, the displacements of stationary and rotating cylindrical artifacts are measured. Error from using a conventionally calibrated sensor with a non-flat (e.g., cyli...